產品詳情
|
Item |
Specifications |
Specifications |
Actual indicators
|
|
|
Payload (End-effector + wafer / each wrist) |
1kg |
1kg |
1.2kg |
|
|
Range of Motion |
R1-axis (extension) |
730mm |
730mm |
729.9mm |
|
R2-axis (extension) |
730mm |
730mm |
729.8mm |
|
|
T-axis (rotation) |
360° |
360° |
360° |
|
|
Z-axis (elevation) |
≤150mm |
≤150mm |
150.2mm |
|
|
Repeatability (300 times measured) |
R1-axis (extension) |
± 0.05mm |
± 0.05mm |
± 0.037mm |
|
R2-axis (extension) |
± 0.05mm |
± 0.05mm |
± 0.038mm |
|
|
T-axis (rotation) |
± 0.003° |
0.005° |
0.0029° |
|
|
Z-axis (elevation) |
± 0.05mm |
± 0.05mm |
± 0.035mm |
|
|
Minimum rotation diameter |
525mm |
525mm |
524.9mm |
|
|
Base Vacuum |
5 x 10?8 Torr |
5 x 10?8 Torr |
2 x 10?9 Torr |
|
|
Leak Rate |
<1 x 10?9std.cc/sec He
|
<1 x 10?9std.cc/sec He
|
<8 x 10?10std.cc/sec He |
|
